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KMID : 1059519860300030327
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Journal of the Korean Chemical Society
1986 Volume.30 No. 3 p.327 ~ p.332
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Spatial Distribution of Electron Number Density in an Inductively Coupled Plasma
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Choi Beom-Suk
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Abstract
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Spatial (radial and height) distribution of electron number density is measured for an inductively coupled plasma under five operating conditions: (1) no carrier gas, (2) carrier gas without aerosel, (3) carrier gas with aerosol, (4) carrier gas with desolvated aerosol, and (5) carrier gas with aerosol and excess lithium. A complete RF power mapping of electron density is obtained. The plasma electrons for a typical analytical torch are observed to be hollow at the radial center in the region close to the induction coil, but diffuse rapidly toward the center in the higher region of the plasma. The presence of excess Li makes no significant change in the electron density profiles. The increases in the RF power levels increase the values of electron density uniformly across the radial coordinate.
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